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    Variable Angle Laser Ellipsometer

    Variable Angle Laser Ellipsometer
    Variable Angle Laser Ellipsometer
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    Product Code : VALE
    Product Description

    Variable Angle Laser Ellipsometer

    Variable Angle Laser Ellipsometer Model No: HO-ED-P15 Ellipsometry is a very sensitive optical technique which provides unequaled capabilities for thin film metrology. Ellipsometry exploits phase information and polarization state of light and so can achieve angstrom level resolution. The main advantages of ellipsometry are its non-destructive character, high sensitivity and wide measurement range. The optical parameters like thickness and refractive indices of a thin film can be determined precisely by this technique.

     

    In the ellipsometer model no: HO-ED-P-06, an elliptically polarized light is made incident on the test substrate and the reflected light which is linearly polarized is analyzed for polarization changes.

    The instrument consists of two concentrically rotating arms around a precisely graduated disc fixed to a heavy base. A laser source is held on one arm and the detector assembly on the other arm. The graduated disc has 1 scale and 0.1 resolution achieved through a vernier. Power supplies for laser source and detector are placed separately. Incident angle for laser source can be adjusted between 30 and 90 . For null method, detector can be replaced with a miniature screen for visual determination of null point, if required.

    As shown in the Fig., randomly polarized laser light (532nm) passes through a polarizer which changes the polarization of light from random polarization to linear polarization. The linearly polarized light then passes through a quarter-wave plate (set the fast axis at 45 degree) which changes the polarization state from linear to elliptical. After reflection from the sample thin film, the elliptically polarized light becomes linearly polarized and an analyzer measures the degree of polarization.

    SPECIFICATIONS

    Measurement Range : 1 nm ~ 300 nm
    Incident Angle : 30° ~ 90°, Error ≤ 0.1°

    Rotation Range

    Polarizer : 0° ~ 360°
    Quarter-Wave : 0° ~ 360°
    Resolution : 0.1 degree

    Laser

    Type: DPSS
    Wavelength: 532nm
    Output Power : 5mW

    Laser Arm

    Rotation range : 70 degrees (from horizontal plane)
    Main scale division : 1 degree
    Resolution : 0.1 degree

    Detector

    Type : Si Photodiode with 5.8 x 5.8mm active area

    Detector Arm

    Rotation Range : 70 degrees (from horizontal plane)
    Main scale division : 1 degree
    Resolution : 0.1 degree

    Sample holder

    Height adjustment range : 10mm
    Drive resolution : 10 microns
    tilting range : +/- 2 degree

     


    Additional Information:
    • Item Code: HO-ED-P15
    Trade Information
    • Main Domestic Market
    • All India

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