Product Description

Spectroscopic ellipsometer is widely used for thin film and measurements. Holmarcs spectroscopic ellipsometer incorporates Rotating Analyzer Ellipsometry technology to characterize thin film samples. It uses a high speed CCD array detection to collect the entire spectrum. It measures films from nanometer thickness up to tens of microns and the optical properties from transparent to absorbing materials. It accurately measures optical constants like refractive index, film thickness and extinction coefficient.

Our standard system comes with Quartz-Halogen lamp for visible through IR range. Our spectroscopic ellipsometer software allows the user to measure and analyze multilayer thin films and complex thin film structures. An autocollimator, Z stage and tilt platforms are provided for sample alignment. XY motorized stage and motorized rotation stages are provided as unoptional feature for mapping thin film uniformity.

• Non-destructive and non-contact technique
• Analysis of single and multilayer samples
• Accurate measurements of ultra-thin films
• Software for measurement, modeling and automatic operations.
• All range of (, ) can be measured.
• Uniform measurement sensitivity for (, )

Where and are the amplitude ratio and phase shift of the p and s components respectively. Since ellipsometry is measuring the ratio of two values, it is very accurate and reproducible.

Ellipsometry is a highly sensitive technique for thin film analysis. The principle relies on the changes of the polarization state of light when reflecting from a surface. To characterize the polarization state, corresponding to the direction of the electric filed of the electromagnetic wave; two directions are chosen as reference, p-direction (parallel) and s-direction (perpendicular). The reflected light has phase changes that are different for p-direction and s-direction. Ellipsometry measure this state of polarization;p = rp / rs = tan e i

Spectral Range : 450 1000nm
Detector : CCD
Resolution : 2nm
Light Source : Halogen Lamp
Goniometer : 40 90 degree
(Resolution: 0.1 degree, Automated operation)
Thickness Measurement Range : 0.1nm 10micron
Resolution of film thickness : 0.01nm
Resolution of measured R.I. : 0.001
Sample alignment : Semi-automated (optical detection) with
manual 10mm height adjustment and tilt
Sample stage features : X -Y translation over 150 x 150mm (optional)
Measurable film parameters : Refractive index, extinction coefficient,
absorption coefficient and film thickness

• Acquisition and analysis of psi, delta and reflectance at different wavelengths and angles
• User extendable materials library
• Data can be saved as an Excel or text file
• Advanced mathematical fitting algorithm
• Extraction of thickness and optical constants
• Parameterized models
• Multi layer thickness measurement

• Item Code: HO-SE-01